Sputtering Targets e materiali per evaporazione.
Formati
- • Discoidale - Planarmagnetron
- • Rettangolare - Planarmagnetron
- • Delta - Planarmagnetron
- • Anulare
- • Custom
- • Granuli
- • 'Starter Charges'
- • Barre - Filo (solo per i Metalli)
Metalli
| Aluminium | Chromium | Lead | Platinum | Tantalum |
| Antimony | Cobalt | Lithium | Potassium | Tellurium |
| Barium | Gallium | Magnesium | Rhenium | Tin |
| Beryllium | Germanium | Manganese | Rhodium | Titanium |
| Bismuth | Gold | Molybdenum | Rubidium | Tungsten |
| Boron | Hafnium | Niobium | Ruthenium | Vanadium |
| Cadmium | Indium | Nickel | Selenium | Zinc |
| Calcium | Iridium | Osmium | Silicon | Zirkonium |
| Carbon | Iron | Palladium | Strontium |
Terre Rare
| Cerium | Gadolinium | Neodymium | Terbium | |
| Dysprosium | Holmium | Praseodymium | Thulium | |
| Erbium | Lutetium | Samarium | Ytterbium | |
| Europium | Lanthanum | Scandium | Yttrium |
Leghe
| Al/B | Au/Pt | Cr/SiO 2 Cermet | Ir/Mn | Si/Al |
| Al/Cu | Au/Sn | Cu/Al | Ni/Cr | Si/Cr |
| Al/Cu/Si | Au/Zn | Cu/Cr | Ni/Fe | Ta/Ti |
| Al/Cr | Bi/Sb | Cu/Ga | Ni/Ti | Ti/Al |
| Al/Li | Bi/Sb/Se | Cu/Ni | Ni/V | Ti/W |
| Al/Mg | Bi/Sb/Se/Te | Cu/Sn | Ni/Zr | Ti/Zr |
| Al/Si | Bi/Sb/Te | Fe/Al/Si | Os/Ru | W/Ti |
| Al/Ti | Bi/Se | Fe/Cr | Pb/Se | Zn/Al |
| Au/Sb | Bi/Te | Fe/Mn | Pb/Te | Zr/Y |
| Au/Ag | Cd/Te | Fe/Ru/Ga/Si | Pb/Se/Te | |
| Au/B | So/Cr | Fe/Si | Pd/Pt | |
| Au/Be | Co/Fe | Fe/Si/B/C | Pt/Ru | |
| Au/Ge | Co/Nb/Zr | Ge/Si | Pt/Ag | |
| Au/Ir | Co/Ni | Ge/Te | Sb/In | |
| Au/Pd | Co/Ta/Zr | In/Sn | Sb/In/Sn |
Ossidi
| Al 2 O 3 | CuO | PbZrO 3 | Supercond. | Y 2 O 3 |
| Sb 2 O 3 | HfO 2 unstab. | LiNbO 3 | SrO | ZnO |
| BaTiO 3 | HfO 2 /CaO | MgO | SrTiO 3 | ZnO dop. |
| Bi 2 O 3 | HfO 2 /Y 2 O 3 | MoO 3 | SrZrO 3 | ZrO 2 unstab. |
| Bi 2 TiO 5 | In 2 O 3 | Nb 2 O 3 | Ta 2 O 5 | ZrO 2 /CaO |
| Bi 4 Ti 3 O 12 | ITO | Nb 2 O 5 | ThO 2 | ZrO 2 /Y 2 O 3 |
| BiTiO 3 | LaAlO 3 | RE 2 O 3 | SnO 2 | |
| CeO 2 | La 2 O 3 | SiO 2 | TiO 2 | |
| CrO 3 | PbTiO 3 | SiO | WO 3 |
Boruri
| CrB 2 | Mo 2 B 6 | TiB 2 | VB 2 | |
| HfB 2 | NbB 2 | Wb | ZrB 2 | |
| LaB 6 | TaB 2 | W 2 B |
Carburi
| B 4 C | Mo 2 C | TaC | WC 6 %Co | ZrC |
| Cr 3 C 2 | NbC | TiC | WC 12 %Co | |
| HfC | SiC | WC | VC |
Fluoruri
| AlF 3 | CeF 3 | LiF | RE/NaF | YF 3 |
| BaF 2 | LaF 3 | MgF 2 | Na 3 AlF 6 | |
| CaF 2 | PbF 2 | KF | ThF 4 |
Nitruri
| AlN | HfN | Si 3 N 4 | TiN | ZrN |
| BN | NbN | TaN | VN |
Siliciuri
| CrSi 2 | MoSi 2 | TaSi 2 | Ti 5 Si 3 | V 3 Si |
| Cr 3 Si | NbSi 2 | Ta 5 Si 3 | WSi 2 | ZrSi 2 |
| HfSi 2 | PtSi | TiSi 2 | VSi 2 |
Solfuri, Seleniuri, Tellururi
| As 2 S 3 | PbS | NbSe 2 | TaTe 2 | ZnS |
| CdSe | PbTe | Nb-S | WSe 2 | ZnTe |
| CdSe | MoSe 2 | NbTe 2 | WsS 2 | |
| CdTe | MoS 2 | TaSe 2 | WTe 2 | |
| PbSe | MoTe 2 | TaS 2 | ZnSe |
